Detection of Radical and Reactive Species Formed in Wafer Cleaning Solutions Irradiated with Megasonic Waves

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Name

Semiconductor Research Corporation

Anticipated Amount

158 514.00

Activity Type

Research

Award Type

Contract

Date

June 1, 2012 to May 30, 2014

Award Number

005497-00001

Sponsor Award Number

2012-OJ-2324

Award Contacts

Name

Raghavan,Srini

Title

Principal Investigator

Name

Keswani,Manish K

Title

Co-Investigator

Unit

Materials Science & Engr

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